Silicon Carbide Microelectromechanical Systems for Harsh Environments

Front Cover
Rebecca Cheung
Imperial College Press, Jan 1, 2006 - Science - 181 pages
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This unique book describes the science and technology of silicon carbide (SiC) microelectromechanical systems (MEMS), from the creation of SiC material to the formation of final system, through various expert contributions by several leading key figures in the field. The book contains high-quality up-to-date scientific information concerning SiC MEMS for harsh environments summarized concisely for students, academics, engineers and researchers in the field of SiC MEMS. This is the only book that addresses in a comprehensive manner the main advantages of SiC as a MEMS material for applications in high temperature and harsh environments, as well as approaches to the relevant technologies, with a view progressing towards the final product. Contents: Introduction to Silicon Carbide (SiC) Microelectromechanical Systems (MEMS) (R Cheung); Deposition Techniques for SiC MEMS (C A Zorman et al.); Review of Issues Pertaining to the Development of Contacts to Silicon Carbide: 1996-2002 (L M Porter & F A Mohammad); Dry Etching of SiC (SJ Pearton); Design, Performance and Applications of SiC MEMS (S Zappe). Key Features Includes contributions from technical and academic experts in the field of SiC Up-to-date information from scientific papers with relevant references Indispensible volume for academic researchers and industrial engineers working in MEMS and particularly SiC MEMS Readership: Academic researchers in MEMS and industrial engineers engaged in SiC MEMS research.

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