A User's Guide to Vacuum TechnologyJohn Wiley & Sons, 2005/02/18 - 536 ページ In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user. |
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applications argon atmosphere baked base calculated cause chamber Chapter cleaning closed coefficient components compression conductance connected constant contains cooled Copyright dependent deposition described desorption determined diameter diffusion pump discussed echnol effects electron energy example Figure first fluid gas flow gases gauge given glass heat helium high vacuum hydrogen illustrates increase inlet ionization leak limit liquid load lubrication mass materials maximum measured mechanical pump metal molecular molecules nitrogen operation outgassing particle peak permeation pipe problem properties pumping speed range ratio reach reduced region removed Reprinted with permission result roughing seal sensitivity shown shows stage stainless steel surface Table techniques temperature thermal throughput trap tube turbomolecular pump units vacuum pump vacuum system valve vapor pressure viscosity volume wall water vapor welding