A User's Guide to Vacuum Technology

前表紙
John Wiley & Sons, 2003/07/04 - 536 ページ
In the decade and a half since the publication of the Second Edition of A User?s Guide to Vacuum Technology there have been many important advances in the field, including spinning rotor gauges, dry mechanical pumps, magnetically levitated turbo pumps, and ultraclean system designs. These, along with improved cleaning and assembly techniques have made contamination-free manufacturing a reality. Designed to bridge the gap in both knowledge and training between designers and end users of vacuum equipment, the Third Edition offers a practical perspective on today?s vacuum technology. With a focus on the operation, understanding, and selection of equipment for industrial processes used in semiconductor, optics, packaging, and related coating technologies, A User?s Guide to Vacuum Technology, Third Edition provides a detailed treatment of this important field. While emphasizing the fundamentals and touching on significant topics not adequately covered elsewhere, the text avoids topics not relevant to the typical user.
 

レビュー - レビューを書く

レビューが見つかりませんでした。

目次

Gas Properties 9
9
Gas Flow
25
Gas Release from Solids
57
Pressure Gauges
81
Flow Meters
109
Pumping Speed
123
Residual Gas Analyzers
133
Interpretation of RGA Data
161
Ultraclean Vacuum Systems
403
High Flow Systems
415
Multichamber Systems
431
Isotopic Abundances
433
Leak Detection
447
Symbols
459
B Gas Properties 466
Material Properties 478
2

PRODUCTION
181
Turbomolecular Pumps
201
Diffusion Pumps
217
Pump Fluids
229
Getter and Ion Pumps
247
Cryogenic Pumps
263
MATERIALS
287
Joints Seals and Valves
313
Lubrication
345
SYSTEMS
357
High Vacuum Systems
379
E Cracking Patterns 492
Cracking Patterns of Gases 494
2
Cracking Patterns of Common Vapors 495
3
Cracking Patterns of Common Solvents 496
4
Cracking Patterns of Semiconductor Dopants 497
5
F Pump Fluid Properties 499
6
Vapor Pressures of Mechanical Pump Fluids 499
7
Vapor Pressure of Diffusion Pump Fluids 500
10
References 503
11
Index 505
著作権

他の版 - すべて表示

多く使われている語句

著者について (2003)

John F. O’Hanlon, PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

書誌情報